ASML High NA EUV

Intel says it has already passed a million High-NA EUV wafers – more than the rest of the industry combined | Daily Reports Online

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  • Intel says it has processed more than one million wafers on High-NA EUV scanners
  • The figure includes tool certification, R&D, and production combined
  • ASML’s total figure of 1.35 million High-NA wafers made to date puts Intel at roughly three-quarters of the world total to-date

Intel Foundry and ASML used the recent SPIE Photomask Technology and EUV Lithography conference in Monterey to announce the former has now processed more than one million 300mm wafers on ASML’s High-NA EUV scanners.


The milestone is a key achievement for the chipmaker, which was only recently being considered an also-ran in the AI race, even as pressure continued to build up around its foundry ambitions.


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